Anatase Thin Films by Ultrasonic Spray Pyrolysis

TiO₂ thin films were deposited on glass slides using ultrasonic spray pyrolysis at 400 °C for times in the range 30–120 min. All of the films consisted of fully dense polycrystalline anatase. The first-order growth kinetics were determined to be 11 nm/min, which is similar to those of other thin-film fabrication methods. Optical transmission data showed that the films were highly transparent and that they could be differentiated into two types: The two thinner films (420 and 690 nm thickness) were smoother and more transparent while the two thicker films (1000 and 1290 nm thickness) were rougher and more translucent.