Ionic Interdiffusion as Interaction Mechanism Between Al and Si₃N₄

Al-Si₃N₄ couples were heat-treated at 850-1150°C for 250 hours. The thickness of the interacted area was measured by scanning electron microscopy (SEM) and scanning/transmission electron microscopy (TEM/STEM). The interaction rate increases exponentially with inverse temperature, with an activation energy of 194.23 kJ/mol and diffusion pre-coefficient of 5 × 10⁻⁹ m²/s, indicating that the interaction is diffusion-dependent. As the results showed, the interfacial area is comprised of Al alloy channels, Si precipitates, and AlN grains. Al-Si transfer through the solid solution (Si_3-xAl_xN_4-y) at the interface of Al alloy and β-Si₃N₄ grains controls the kinetic of the interaction. When concentration of Al in solid solution exceeds a certain amount, it undergoes a topotactic phase transformation to form Al_1-xSi_xN_1+y (viz., AlN). Next, the Al_1-xSi_xN_1+y grains detach from the β-Si₃N₄ grains and subsequently new Al-Si₃N₄ interfaces are established. These interfaces repeat the interaction process, continuing until all the reactant is depleted. Thus, the interaction kinetics consist of a sequence of associated parabolic stages, precluding the observation of parabolic kinetics.

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